Two types of multilayer PZT actuators were prepared with their layer thicknesses of 280 and 17 μm, as shown in Figure 3.44a and b, ^so This PZT composition has tetragonal symmetry, and when the x-ray diffraction pattern was taken for both samples from the top surface, Figure 3.45 was obtained. The sample with 280 μm layer thickness seemed to have no texture by showing the x-ray intensity ratio roughly 1: 2 for the (001) and (100) reflections, while the intensity of the (001) reflection was ver
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