Few would expect the future of artificial intelligence (AI) to depend on Eindhoven, a quiet Dutch town. Yet just beyond its borders sits the headquarters of ASML, the only company that makes the ...
Researchers have developed a new shrinking technique that enables the creation of tiny 3D ...
Using a new technique that can create vacancies at any site across a material and then shrink it to about 1/2,000 of its ...
The development of nanoelectronics has enabled operations at the nanoscale, resulting in the creation of smaller and more efficient electronic devices. Here, we offer a comprehensive summary of the ...
It appears that optical lithography, the hardest-working technology in semiconductor manufacturing, is coming, finally, to the end of its road. The problem is, X-ray lithography, long touted as the ...
New type of EUV lithography using only four reflective mirrors overturns conventional technology and will contribute to advanced semiconductors at 7nm and below Okinawa Institute of Science and ...
Laser pushed sails—ultrathin need reflective structures that are square meters but weight a gram. If the sails and the payload each weigh a gram, such a spacecraft could accelerate to one fifth of the ...
Lithography, based on conventional ink-printing processes, is a technique for patterning a variety of layers, such as conductors, semiconductors, or dielectrics, on a surface. Nanopatterning stretches ...
Researchers have created a photonic device that provides programmable on-chip information processing without lithography, offering the speed of photonics augmented by superior accuracy and flexibility ...
M. K. Sears, J. Bekaert, B. W. Smith, "Pupil wavefront manipulation for optical nanolithography", Proc. SPIE 8326, (2012) paper M. K. Sears, G. Fenger, J. Mailfert, B ...